University of Oulu

Maciej Sobocinski, David Bilby, David Kubinski, Jaco Visser, Mike Andersson, Jari Juuti, Anita Lloyd Spetz, Heli Jantunen, SiC MOSFET Soot Sensor in a Co-fired LTCC Package, Procedia Engineering, Volume 168, 2016, Pages 27-30, ISSN 1877-7058, (

SiC MOSFET soot sensor in a co-fired LTCC package

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Author: Sobocinski, Maciej1; Bilby, David2; Kubinski, David2;
Organizations: 1Microelectronics Research Unit, Faculty of Information technology and electrical engineering, University of Oulu, Finland
2Ford Motor Company, 2101 Village Rd. Dearborn, MI 48121, USA
3Div. of Appl. Sensor Science, IFM, Linköping University, SE-581 83 Linköping, Sweden
Format: article
Version: published version
Access: open
Online Access: PDF Full Text (PDF, 0.5 MB)
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Language: English
Published: Elsevier, 2016
Publish Date: 2017-04-05


A novel method for soot detection based on SiC MOSFET devices with a dual suspended/ floating gate configuration in a co-fired LTCC package has been investigated. Response to different concentrations of soot was measured through the application of an electric field between the two gate electrodes to attract charged soot onto the sensor surface. Results are promising with application areas from automotive and transportation to air pollution control.

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Series: Procedia engineering
ISSN: 1877-7058
ISSN-E: 1877-7058
ISSN-L: 1877-7058
Volume: 168
Pages: 27 - 30
DOI: 10.1016/j.proeng.2016.11.123
Type of Publication: A1 Journal article – refereed
Field of Science: 213 Electronic, automation and communications engineering, electronics
Copyright information: © 2016 The Author(s). Published by Elsevier Ltd. This is an open access article under the CC BY-NC-ND license (