Optical NIR-VIS-VUV constants of advanced substrates for thin-film devices
|Author:||Chernova, E.1,2; Brooks, C.1,3; Chvostova, D.1;|
1Institute of Physics, Academy of Sciences of the Czech Republic, Na Slovance 2, 182 21 Prague 8, Czech Republic
2Czech Technical University in Prague, Faculty of Nuclear Sciences and Physical Engineering, Technicka 2, 166 27 Prague 6, Czech Republic
3ELI Beamlines, Institute of Physics, Academy of Sciences of the Czech Republic, Na Slovance 2, 182 21 Prague, Czech Republic
4Microelectronics Research Unit, University of Oulu, P. O. Box 4500, FI-90014 Oulun yliopisto, Finland
|Online Access:||PDF Full Text (PDF, 0.4 MB)|
|Persistent link:|| http://urn.fi/urn:nbn:fi-fe2019050814744
Optical Society of America,
|Publish Date:|| 2019-05-08
The optical properties of several commonly used single-crystal oxide substrates were explored by spectroscopic ellipsometry over a wide spectral range from 0.74 eV to 8.8 eV. The crystals examined are (100) SrTiO₃, 0.7 % wt Nb-doped (100) SrTiO₃,(100) (LaAlO₃)₀.₂₉(SrAl₀.₅Ta₀.₅O₃)₀.₇, (011) DyScO₃, (100) MgAl₂O₄, (100) MgO, and (100) LaAlO₃, all of which enable epitaxial growth of numerous perovskite-type and other optical thin films. An analytic form for the complex dielectric function was derived from ellipsometric data through a physically consistent modeling process. The obtained dielectric spectra were further utilized to calculate the complex index of refraction and absorption coefficient for each substrate material. The absorption spectra and optical band gap were analyzed using Tauc plots. The parameters for reconstructing the dielectric functions are given in detail, allowing for extensive applications of the results of this work.
Optical materials express
|Type of Publication:||
A1 Journal article – refereed
|Field of Science:||
216 Materials engineering
The Grant Agency of the Czech Republic (Grant Nos. 15-15123S and 15-13778S); ELI - Extreme Light Infrastructure - phase 2 (CZ.02.1.01/0.0/0.0/15_008/0000162 ) from European Regional Development Fund; and the Grant Agency of the Czech Technical University in Prague (SGS16/244/OHK4/3T/14).
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