University of Oulu

Miroslav Jelínek, Přemys Vaněk, Zdeněk Tolde, Elena Buixaderas, Tomáš Kocourek, Václav Studnička, Jan Drahokoupil, Jan Petzelt, Jan Remsa, Marina Tyunina, PLD prepared bioactive BaTiO₃ films on TiNb implants, Materials Science and Engineering: C, Volume 70, Part 1, 2017, Pages 334-339, ISSN 0928-4931,

PLD prepared bioactive BaTiO₃ films on TiNb implants

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Author: Jelínek, Miroslav1,2; Vaněk, Přemysl1; Tolde, Zdeněk3;
Organizations: 1Institute of Physics of the Czech Academy of Sciences, Na Slovance 2, 182 21 Prague 8, Czech Republic
2Czech Technical University in Prague, Faculty of Biomedical Engineering, nam. Sitna 3108, 212 01 Kladno, Czech Republic
3Department of Materials Engineering, Faculty of Mechanical Engineering, Czech Technical University in Prague, Karlovo náměstí 13, 121 35 Prague 2, Czech Republic
4Microelectronics Research Unit, Faculty of Information Technology and Electrical Engineering, University of Oulu, Finland
Format: article
Version: accepted version
Access: open
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Language: English
Published: Elsevier, 2017
Publish Date: 2019-05-13


BaTiO₃ (BTO) layers were deposited by pulsed laser deposition (PLD) on TiNb, Pt/TiNb, Si (100), and fused silica substrates using various deposition conditions. Polycrystalline BTO with sizes of crystallites in the range from 90 nm to 160 nm was obtained at elevated substrate temperatures of (600 °C–700 °C). With increasing deposition temperature above 700 °C the formation of unwanted rutile phase prevented the growth of perovskite ferroelectric BTO. Concurrently, with decreasing substrate temperature below 500 °C, amorphous films were formed. Post-deposition annealing of the amorphous deposits allowed obtaining perovskite BTO. Using a very thin Pt interlayer between the BTO films and TiNb substrate enabled high-temperature growth of preferentially oriented BTO. Raman spectroscopy and electrical characterization indicated polar ferroelectric behaviour of the BTO films.

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Series: Materials science & engineering. C, Materials for biological applications
ISSN: 0928-4931
ISSN-E: 1873-0191
ISSN-L: 0928-4931
Volume: 70
Issue: 1
Pages: 334 - 339
DOI: 10.1016/j.msec.2016.08.072
Type of Publication: A1 Journal article – refereed
Field of Science: 216 Materials engineering
Funding: The work was supported by the Grant Agency of the Czech Technical University in Prague, grant No. SGS14/168/OHK4/2T/17 and by Grant Agency of the Czech Republic (grant GA-15-01558S and GA-15-05864S).
Copyright information: © 2016 Elsevier B.V. All rights reserved. This manuscript version is made available under the CC-BY-NC-ND 4.0 license