University of Oulu

I.J. Induja, K.P. Surendran, M.R. Varma, M.T. Sebastian, Low κ, low loss alumina-glass composite with low CTE for LTCC microelectronic applications, Ceramics International, Volume 43, Issue 1, Part A, 2017, Pages 736-740, ISSN 0272-8842, https://doi.org/10.1016/j.ceramint.2016.10.002

Low κ, low loss alumina-glass composite with low CTE for LTCC microelectronic applications

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Author: Induja, I.J.1; Surendran, K.P.1; Varma, M.R.1;
Organizations: 1Materials Science & Technology Division, National Institute for Interdisciplinary Science & Technology, Thiruvananthapuram 695019, India
2Microelectronics Research Unit, Faculty of Information Technology & Electrical Engineering, University of Oulu, P.O. Box 4500, Oulu FI90014, Finland
Format: article
Version: accepted version
Access: open
Online Access: PDF Full Text (PDF, 0.8 MB)
Persistent link: http://urn.fi/urn:nbn:fi-fe2019052016158
Language: English
Published: Elsevier, 2017
Publish Date: 2019-05-20
Description:

Abstract

Alumina based low κ LTCC composite has been prepared with the use of AGC commercial glass (DL828). The 30 wt% Al₂O₃–70 wt% AGC glass composite was sintered at 875 °C (2 h). X-ray diffraction study indicated the presence of BaSi₂O₅, BaAl₂Si₂O₈ and Ba₂Si₃O₈ secondary phases in addition to Al₂O₃ in the composite. The bulk ceramic sintered at 875 °C has κ of 4.80 and tan δ of 0.007 at 1 MHz. The composite shows good microwave dielectric properties: κ of 4.52, tan δ of 0.004 and τκ close to zero. The composite has a low CTE of 4.38 ppm/°C which is close to that of silicon used in microelectronic industry and thermal conductivity of 1.41 W m⁻¹ K⁻¹ at room temperature. The results indicate that the Al₂O₃ - AGC glass composite has good dielectric, thermal properties and is chemically compatible with Ag electrode indicating it as a promising candidate for low κ LTCC substrate applications.

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Series: Ceramics international
ISSN: 0272-8842
ISSN-E: 1873-3956
ISSN-L: 0272-8842
Volume: 43
Issue: 1
Pages: 736 - 740
DOI: 10.1016/j.ceramint.2016.10.002
OADOI: https://oadoi.org/10.1016/j.ceramint.2016.10.002
Type of Publication: A1 Journal article – refereed
Field of Science: 213 Electronic, automation and communications engineering, electronics
216 Materials engineering
116 Chemical sciences
Subjects:
Funding: Induja. I. J is grateful to the Kerala State Council for Science,Technology and Environment (KSCSTE), Kerala, India (Grant no. 001/FSHO/2012/KSCSTE) for the award of Research Fellowship.
Copyright information: © 2016 Elsevier Ltd and Techna Group S.r.l. All rights reserved. This manuscript version is made available under the CC-BY-NC-ND 4.0 license http://creativecommons.org/licenses/by-nc-nd/4.0/.
  https://creativecommons.org/licenses/by-nc-nd/4.0/