Abstract

A cubic rock salt structured ceramic, Li₇Ti₃O₉F, was fabricated via the conventional solid-state reaction route. The synthesis conditions, sintering characteristics, and microwave dielectric properties of Li₇Ti₃O₉F ceramics were investigated by X-ray diffraction (XRD), thermal dilatometer, Scanning Electron Microscopy (SEM) accompanied with EDS mapping, and microwave resonant measurements. Rietveld refinement, selected area electron diffraction (SAED) pattern and high-resolution transmission electron microscopy (HRTEM) confirmed that Li₇Ti₃O₉F adopts a cubic rock-salt structure. The ceramic sintered at 950 °C presented the optimal microwave properties of εᵣ = 22.5, Q×f = 88,200 GHz, and τf  = −24.2 ppm/°C. Moreover, good chemical compatibility with Ag was verified through cofiring at 950 °C for 2 h. These results confirm a large potential for Li₇Ti₃O₉F ceramic to be utilized as substrates in the low temperature cofired ceramic (LTCC) technology. This work provides the possibility to exploit low-temperature-firing ceramics through solid solution between oxides and fluorides.