University of Oulu

J. Lauri, C. Liedert and T. Fabritius, "Wavelength Scanning Interferometry for Topography of Microchannels at Roll-to-Roll Line with Optical Coherence Tomography," 2021 IEEE International Instrumentation and Measurement Technology Conference (I2MTC), 2021, pp. 1-6, doi: 10.1109/I2MTC50364.2021.9460091

Wavelength scanning interferometry for topography of microchannels at roll-to-roll Line with optical coherence tomography

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Author: Lauri, Janne1; Liedert, Christina2; Fabritius, Tapio1
Organizations: 1Optoelectronics and Measurement Techniques Research Unit University of Oulu Oulu, Finland
2VTT, Technical Research Centre of Finland Oulu, Finland
Format: article
Version: accepted version
Access: open
Online Access: PDF Full Text (PDF, 1 MB)
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Language: English
Published: Institute of Electrical and Electronics Engineers, 2021
Publish Date: 2021-09-27


Roll-to-roll (R2R) process is mass manufacturing method that can produce various products ranging from printed electronics to microfluidics. Microfluidics, used in biosensors, demands high tolerances and quality to guarantee correct functionality of sensors. In this work, optical coherence tomography device was installed at the R2R-line to measure the height and width of the hot embossed microchannel structures at speed of 1m/min. The repeating channel structure on the 10 m long sample web was measured at 1m interval. An algorithm, typically used in wavelength scanning interferometry (WSI), is utilized to recover topography at nanometer scale. The results showed that the R2R hot embossing process was very stable and predictable. If process parameters, for instance pressure at the hot embossing unit was increased, it resulted deeper channels as expected. The OCT, with the WSI algorithm, provides topography of microchannel at nanometer scale being thus an excellent tool for optimization of process parameters and for on-line quality control.

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Series: IEEE International Instrumentation and Measurement Technology Conference
ISSN: 2642-2069
ISSN-E: 2642-2077
ISSN-L: 2642-2069
ISBN: 978-1-7281-9539-1
ISBN Print: 978-1-7281-9540-7
Pages: 1 - 6
Article number: 9460091
DOI: 10.1109/I2MTC50364.2021.9460091
Host publication: 2021 IEEE International Instrumentation and Measurement Technology Conference, I2MTC 2021
Conference: IEEE International Instrumentation and Measurement Technology Conference
Type of Publication: A4 Article in conference proceedings
Field of Science: 114 Physical sciences
213 Electronic, automation and communications engineering, electronics
Funding: J.L is partially supported by European Regional Development Fund (project: PrintoCent10, no. A73286 and PrintoDiSe, no. A76026). T.F is partially supported by Academy of Finland’s FIRI funding (grant no. 320017).
Academy of Finland Grant Number: 320017
Detailed Information: 320017 (Academy of Finland Funding decision)
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