University of Oulu

Suitability of the equipment for the implementation of Glop Top protection in MEMS sensor manufacturing

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Author: Härkönen, Heino1
Organizations: 1University of Oulu, Faculty of Technology, Mechanical Engineering
Format: ebook
Version: published version
Access: restricted
  Theses with restricted access are only available for reading on the e-thesis workstations.
Pages: 65
Persistent link:
Language: English
Published: Oulu : H. Härkönen, 2021
Publish Date: 2021-02-18
Thesis type: Master's thesis (tech)
Tutor: Liedes, Toni
Reviewer: Liedes, Toni
Pylvänäinen, Mika
Copyright information: © Heino Härkönen, 2021. This publication is copyrighted. You may download, display and print it for your own personal use. Commercial use is prohibited.