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Suitability of the equipment for the implementation of Glop Top protection in MEMS sensor manufacturing |
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| Author: | Härkönen, Heino1 |
| Organizations: |
1University of Oulu, Faculty of Technology, Mechanical Engineering |
| Format: | ebook |
| Version: | published version |
| Access: | restricted |
| Theses with restricted access are only available for reading on the e-thesis workstations. | |
| Pages: | 65 |
| Persistent link: | http://urn.fi/URN:NBN:fi:oulu-202102181197 |
| Language: | English |
| Published: |
Oulu : H. Härkönen,
2021
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| Publish Date: | 2021-02-18 |
| Thesis type: | Master's thesis (tech) |
| Tutor: |
Liedes, Toni |
| Reviewer: |
Liedes, Toni Pylvänäinen, Mika |
| Subjects: | |
| Copyright information: |
© Heino Härkönen, 2021. This publication is copyrighted. You may download, display and print it for your own personal use. Commercial use is prohibited. |