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Requirements for UV-based nanoimprint lithography |
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| Author: | Hytönen, Elina1 |
| Organizations: |
1University of Oulu, Faculty of Technology, Chemistry |
| Format: | ebook |
| Version: | published version |
| Access: | restricted |
| Theses with restricted access are only available for reading on the e-thesis workstations. | |
| Pages: | 54 |
| Persistent link: | http://urn.fi/URN:NBN:fi:oulu-202306212691 |
| Language: | English |
| Published: |
Oulu : E. Hytönen,
2023
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| Publish Date: | 2023-06-21 |
| Thesis type: | Master's thesis |
| Tutor: |
Kangas, Teija Tuomikoski, Sari |
| Reviewer: |
Tuomikoski, Sari Kangas, Teija |
| Subjects: | |
| Copyright information: |
© Elina Hytönen, 2023. This publication is copyrighted. You may download, display and print it for your own personal use. Commercial use is prohibited. |