Low κ, low loss alumina-glass composite with low CTE for LTCC microelectronic applications
Induja, I.J.; Surendran, K.P.; Varma, M.R.; Sebastian, M.T. (2017-01-31)
I.J. Induja, K.P. Surendran, M.R. Varma, M.T. Sebastian, Low κ, low loss alumina-glass composite with low CTE for LTCC microelectronic applications, Ceramics International, Volume 43, Issue 1, Part A, 2017, Pages 736-740, ISSN 0272-8842, https://doi.org/10.1016/j.ceramint.2016.10.002
© 2016 Elsevier Ltd and Techna Group S.r.l. All rights reserved. This manuscript version is made available under the CC-BY-NC-ND 4.0 license http://creativecommons.org/licenses/by-nc-nd/4.0/.
https://creativecommons.org/licenses/by-nc-nd/4.0/
https://urn.fi/URN:NBN:fi-fe2019052016158
Tiivistelmä
Abstract
Alumina based low κ LTCC composite has been prepared with the use of AGC commercial glass (DL828). The 30 wt% Al₂O₃–70 wt% AGC glass composite was sintered at 875 °C (2 h). X-ray diffraction study indicated the presence of BaSi₂O₅, BaAl₂Si₂O₈ and Ba₂Si₃O₈ secondary phases in addition to Al₂O₃ in the composite. The bulk ceramic sintered at 875 °C has κ of 4.80 and tan δ of 0.007 at 1 MHz. The composite shows good microwave dielectric properties: κ of 4.52, tan δ of 0.004 and τκ close to zero. The composite has a low CTE of 4.38 ppm/°C which is close to that of silicon used in microelectronic industry and thermal conductivity of 1.41 W m⁻¹ K⁻¹ at room temperature. The results indicate that the Al₂O₃ - AGC glass composite has good dielectric, thermal properties and is chemically compatible with Ag electrode indicating it as a promising candidate for low κ LTCC substrate applications.
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